1. Within clean room, different types of chemical storage and distribution rooms should be set up based on product production process requirements and the chemical's physical and chemical properties. Pipelines should be used to supply required chemicals to the production equipment. Chemical storage and distribution rooms within clean room are typically located in auxiliary production area, typically on the ground floor of a single-story or multi-story building, near an exterior wall. Chemicals should be stored separately according to their physical and chemical properties. Incompatible chemicals should be placed in separate chemical storage and distribution rooms, separated by solid partitions. Hazardous chemicals should be stored in separate storage or distribution rooms with a fire resistance rating of at least 2.0 hours between adjacent rooms. These rooms should be located in a room on the first floor of the production building, near an exterior wall.
2. Clean rooms in electronics industries often have storage and distribution rooms for acids and alkalis, as well as for flammable solvents. Acid storage and distribution rooms typically house storage and distribution systems for sulfuric acid, phosphoric acid, hydrofluoric acid, and hydrochloric acid. Alkali storage and distribution rooms typically house storage and distribution systems for sodium hydroxide, hydroxide cake, ammonium hydroxide, and tetramethylammonium hydroxide. Flammable solvent storage and distribution rooms typically house storage and distribution systems for organic solvents such as isopropyl alcohol (IPA). Clean rooms in integrated circuit wafer fabrication plants also have polishing slurry storage and distribution rooms. Chemical storage and distribution rooms are typically located in auxiliary production or support areas near or adjacent to clean production areas, typically on the first floor with direct access to the outdoors.
3. Chemical storage and distribution rooms are equipped with storage barrels or tanks of varying capacities based on the type, quantity, and usage characteristics of the chemicals required for product production. According to standards and regulations, chemicals should be stored separately and classified. The capacity of the barrels or tanks used should be sufficient for seven days' consumption of the chemicals. Daily barrels or tanks should also be provided, with a capacity sufficient to cover the 24-hour consumption of chemicals required for product production. Storage and distribution rooms for flammable solvents and oxidizing chemicals should be separate and separated from adjacent rooms by solid fire-resistant walls with a fire resistance rating of 3.0 hours. If located on the first floor of a multi-story building, they should be separated from other areas by non-combustible floors with a fire resistance rating of at least 1.5 hours. The centralized control room for the chemical safety and monitoring system within clean room should be located in a separate room.
4. The height of chemical storage and distribution rooms within clean room should be determined based on the equipment and piping layout requirements and should generally not be less than 4.5 meters. If located within the auxiliary production area of the clean room, the height of the chemical storage and distribution room should be consistent with the building height.
Post time: Aug-01-2025