FIRE PROTECTION AND WATER SUPPLY IN CLEAN ROOM

Fire protection facilities are an important part of the clean room. Its importance is not only because its process equipment and construction projects are expensive, but also because clean rooms are relatively closed buildings, and some are even windowless workshops. The clean room passages are narrow and tortuous, making it difficult to evacuate personnel and teach fire. In order to ensure the safety of people's lives and property, the fire protection policy of "prevention first, combining prevention and fire" should be implemented in the design. In addition to taking effective fire prevention measures in the design of the clean room, In addition, necessary fire-fighting facilities are also set up. The production characteristics of clean rooms are:

(1) There are many precision equipment and instruments, and a variety of flammable, explosive, corrosive, and toxic gases and liquids are used. The fire hazard of some production parts belongs to Category C (such as oxidation diffusion, photolithography, ion implantation, printing and packaging, etc.), and some belongs to Category A (such as single crystal pulling, epitaxy, chemical vapor deposition, etc.).

(2) The clean room is highly airtight. Once a fire breaks out, it will be difficult to evacuate personnel and put out the fire.

(3) The construction cost of clean room is high and the equipment and instruments are expensive. Once a fire breaks out, the economic losses will be huge.

Based on above characteristics, clean rooms have very high requirements for fire protection. In addition to the fire protection and water supply system, fixed fire extinguishing devices should also be installed, especially valuable equipment and instruments in clean room needs to be carefully determined.