In addition to strict control of particles, electronic clean room represented by chip production workshops, integrated circuit dust-free workshops and disk manufacturing workshops also have stricter requirements for temperature and humidity control, illumination and micro-shock. Strictly remove the impact of static electricity on production products, so that the environment can meet the production process requirements of electronic products in a clean environment.
The temperature and humidity of the electronic clean room should be determined according to the production process requirements. When there are no specific requirements for the production process, the temperature can be 20-26°C and the relative humidity is 30%-70%. The temperature of the personnel clean room and living room can be 16-28℃. According to the Chinese national standard GB-50073, which is in line with international ISO standards, the cleanliness level of this type of clean room is 1-9. Among them, class 1-5, the air flow pattern is unidirectional flow or mixed flow; class 6 air flow pattern is non-unidirectional flow and air change is 50-60 times/h; class 7 air flow type is non-unidirectional flow, and air change is 15-25 times/h; class 8-9 air flow type is non-unidirectional flow, the air change is 10-15 times/h.
According to current specifications, the noise level within class 10,000 electronic clean room should not be greater than 65dB(A).
1. The full ratio of the vertical flow clean room in electronic clean room should not be less than 60%, and the horizontal unidirectional flow clean room should not be less than 40%, otherwise it will be a partial unidirectional flow.
2. The static pressure difference between electronic clean room and the outdoors should not be less than 10Pa, and the static pressure difference between clean areas and non-clean areas with different air cleanliness should not be less than 5Pa.
3. The amount of fresh air in a class 10000 electronic clean room should take the value of the following two items.
4. Compensate the sum of the indoor exhaust air volume and the fresh air volume required to maintain the indoor positive pressure value.
5. Ensure that the amount of fresh air supplied to clean room per person per hour is not less than 40 square meters.
Post time: Apr-08-2024